JVB 23_649.pdf (578.4 kB)
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Copyright(2005) American Vacuum Society. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Vacuum Society.The following article appeared in Journal of Vacuum Science ahnology B, 23(2),pp.649-656 ; 2005 and may be found at http://link.aip.org/link/?jvb/23/649. |
JVB 23_649.pdf
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https://nitech.repo.nii.ac.jp/record/5243/files/JVB 23_649.pdf